Home | Amazing | Today | Tags | Publishers | Years | Account | Search 
Sputtering Materials for VLSI and Thin Film Devices

Buy

An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues.

The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications.

In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful.

  • Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements
  • Practical information on technology trends, role of sputtering and major OEMs
  • Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc.
  • Practical case-studies on target performance and troubleshooting
  • Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry
(HTML tags aren't allowed.)

Business Intelligence: Data Mining and Optimization for Decision Making
Business Intelligence: Data Mining and Optimization for Decision Making

Business intelligence is a broad category of applications andtechnologies for gathering, providing access to, and analyzing datafor the purpose of helping enterprise users make better businessdecisions. The term implies having a comprehensive knowledge of allfactors that affect a business, such as customers, competitors,business partners,...

Apache Server Survival Guide
Apache Server Survival Guide
As one of the most popular servers on the Internet, Apache Server is an
inexpensive, secure alternative to other Web servers! This book is an excellent
resource that addresses diverse networking and configuration issues. This
book, written by a system administrator for system administrators gives you
behind-the-scenes solutions
...
Just Spring Data Access: Covers JDBC, Hibernate, JPA and JDO
Just Spring Data Access: Covers JDBC, Hibernate, JPA and JDO

JDBC has simplified database access in Java applications, but a few nagging wrinkles remain—namely, persisting Java objects to relational databases. With this book, you’ll learn how the Spring Framework makes that job incredibly easy with dependency injection, template classes, and object-relational-mapping (ORM).

...

Solving Problems in Scientific Computing Using Maple and Matlab
Solving Problems in Scientific Computing Using Maple and Matlab
Modern computing tools like Maple (symbolic computation) and MATLAB (a numeric computation and visualisation program) make it possible to easily solve realistic nontrivial problems in scientific computing. In education, traditionally, complicated problems were avoided, since the amount of work for obtaining the solutions was not feasible for...
Introduction to Metadata: Revised Edition
Introduction to Metadata: Revised Edition
Praise for the First Edition:

"An excellent starting point for information professionals to gain a basic understanding of fundamental concepts, then move ahead with a guided path for further research and study." --Art Documentation

Metadata, literally "data about data," provides a means of indexing,
...
Category Theory for Computing Science
Category Theory for Computing Science

This book is a textbook in basic category theory, written specifically to be read by researchers and students in computing science. We expound the constructions we feel are basic to category theory in the context of examples and applications to computing science. Some categorical ideas and constructions are already used heavily in computing...

©2020 LearnIT (support@pdfchm.net) - Privacy Policy