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Micromechanical Photonics (Microtechnology and MEMS)

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The recent remarkable development of microsystems dates back to 1983 when Richard P. Feynman of California University delivered a speech to a large audience of scientists and engineers at the Jet Propulsion Laboratory. He presented the concept of sacrificed etchingto fabricate a silicon micromotor, and pointed out the need for a friction-less, contact sticking-free structure, due to the relative increase of the surface effect in such microsystems and devices. A micromotor fabricated by Fan et al. in 1988 caused a tremendous sensation and opened the way for Micro-Electro-Mechanical-System (MEMS) technology. The diameter of the rotor was 120 μm, its rotational speed was 500 rpm, and the gap between the rotor and the stator was 2 μm. Today, many successful examples of MEMS products can be found: MEMS such as accelerometers, pressure sensors, microphones and gyros are used commercially, and various branches of industry are already includingMEMS components in their new products.

Furthermore, optical MEMS, or micromechanical photonics, are evolvingin interdisciplinary research and engineeringfields to merge independently developed technologies based on optics, mechanics, electronics and physical/chemical sciences. Manufacturingtec hnologies such as semiconductor lasers, surface-micromachiningand bulk-micromachiningare promotingthis fusion of technologies. In addition, new devices such as optical MEMS includingoptical sensors, optical switches, optical scanners, optical heads, near-field probes, optical rotors and mixers, actuators, and microsystems for diagnosis and treatments, and new conceptual frameworks such as micromechanical photonics includingan optical encoder, a tunable laser diode with a microcantilever and Nano-Electro-Mechanical-Systems (NEMS) are appearing.

This is the most comprehensive book on the basics, realization and applications of micromechanical photonics. Its purpose is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics. It does this not only through theoretical and experimental results, but also by describing various products and their fields of application.

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