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Introduction to Microsystem Design (RWTHedition)

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Introduction to Microsystem Design (RWTHedition), 9783642194887 (3642194885), Springer, 2011
This book was developed from lectures held at RWTH Aachen University, Germany and Tsinghua University at Beijing, P.R. China. It may be used as a basis for similar lectures on designing of microsystems. For this purpose, it is recommended to follow the sequence of this book, because it is arranged such that following chapters are building up on previous ones. Students are also strongly recommended to solve the problems included in this book, because this is important for getting familiar with the units and orders of magnitude to be expected in microtechnique. Besides this, often the relevance of the lessons becomes clear much more, when an example calculation shows the importance of the subjects taught.

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.

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