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Books tags: mems

MEMS: Design and Fabrication (Mechanical Engineering)

CRC Press, 2005

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection...

Micromechanical Photonics (Microtechnology and MEMS)

Springer, 2006

The recent remarkable development of microsystems dates back to 1983 when Richard P. Feynman of California University delivered a speech to a large audience of scientists and engineers at the Jet Propulsion Laboratory. He presented the concept of sacrificed etchingto fabricate a silicon micromotor, and pointed out the need for...

Microsensors, MEMS and Smart Devices

John Wiley & Sons, 2001

Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and...

Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering

CRC Press, 2000

Sergey Edward Lyshevski obviously has a lot of experience to draw on for this book... While the book focuses on sensor, motor, and control applications, the author also tries to be comprehensive in all aspects of MEMS operation... Dr. Lyshevski's book is an intriguing and fun tour of NEMS and MEMS.
-IEEE Microwave Magazine, December 2001...

Microelectromechanical Systems: Advanced Materials and Fabrication Methods

National Academy Press, 1997

Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to...

An Introduction to Microelectromechanical Systems Engineering, Second Edition

Artech House Publishers, 2004

The past few years have witnessed an increasing maturity of the MEMS industry and a rapid introduction of new products addressing applications ranging from biochemical analysis to fiber-optic telecommunications. The market size for MEMS products has doubled in the past 5 years and is projected to grow at this fast rate for the foreseeable...

Mechanics of Microelectromechanical Systems

Springer, 2004

This book offers a comprehensive coverage to the mechanics of
microelectromechanical systems (MEMS), which are analyzed from a
mechanical engineer’s viewpoint as devices that transform an input form of
energy, such as thermal, electrostatic, electromagnetic or optical, into output
mechanical motion (in the case of...

MEMS Mechanical Sensors

Artech House Publishers, 2004

With this practical guide to design tools and packaging, professionals and academics can create the sensors they need for a complete range of next generation applications.

Here's the book to keep handy when you have to overcome obstacles in design, simulation,...

Silicon Carbide Microel Ectromechanical Systems for Harsh Environments

Imperial College Press, 2006

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC...

MEMS-based Circuits and Systems for Wireless Communication (Integrated Circuits and Systems)

Springer, 2012

Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various kinds of mechanical Si-MEMS resonators and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The BAW technology has made its way to commercial products for passive RF filters, in particular...

Principles and Applications of NanoMEMS Physics (Microsystems)

Springer, 2005

The field of Nanotechnology, which aims at exploiting advances in the fabrication and controlled manipulation of nanoscale objects, is attracting worldwide attention. This attention is predicated upon the fact that obtaining early supremacy in this field of miniaturization may well be the key to dominating the world economy of the 21st century, and...

The Science and Engineering of Microelectronic Fabrication

Oxford University Press, 2001

Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition, provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in this second edition, the text covers all...

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