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 Micromechanical Photonics (Microtechnology and MEMS)
The recent remarkable development of microsystems dates back to 1983 when
Richard P. Feynman of California University delivered a speech to a large
audience of scientists and engineers at the Jet Propulsion Laboratory. He presented
the concept of sacrificed etchingto fabricate a silicon micromotor, and
pointed out the need for... |  |  |  |  |
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