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Chemical Mechanical Polishing in Silicon Processing, Volume 63
Chemical Mechanical Polishing in Silicon Processing, Volume 63
In the engineering world, many ideas and plans are conceived in the information exchanges that occur over lunch. In the summer of 1997, one of the editors (Shin Hwa Li) was assigned to assist our CMP module at the Crolles facility of STMicroelectronics near Grenoble, France. One day, in the company cafeteria, while sitting near...
Microsensors, MEMS and Smart Devices
Microsensors, MEMS and Smart Devices

Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and...

Transmission Electron Microscopy and Diffractometry of Materials
Transmission Electron Microscopy and Diffractometry of Materials
Experimental methods for diffraction and microscopy are pushing the front edge of nanoscience and materials science, and important new developments are covered in this third edition. For transmission electron microscopy, a remarkable recent development has been a practical corrector for the spherical aberration of the objective...
Low-Frequency Noise in Advanced MOS Devices (Analog Circuits and Signal Processing)
Low-Frequency Noise in Advanced MOS Devices (Analog Circuits and Signal Processing)
The excess noise above the well-known thermal noise and shot noise that shows up at low frequencies, the so-called low-frequency noise (other names are 1/f noise or flicker noise), has raised questions for a long time and has now become more important than ever. The low-frequency noise generated in the electronic devices is a...
Handbook of Chemical Vapor Deposition, 2nd Edition, Second Edition: Principles, Technology and Applications
Handbook of Chemical Vapor Deposition, 2nd Edition, Second Edition: Principles, Technology and Applications
Chemical vapor deposition (CVD) has grown very rapidly in the last twenty years and applications of this fabrication process are now key elements in many industrial products, such as semiconductors, optoelectronics, optics, cutting tools, refractory fibers, filters and many others. CVD is no longer a laboratory curiosity but a...
Fabrication of SiGe HBT BiCMOS Technology
Fabrication of SiGe HBT BiCMOS Technology
While the idea of cleverly using silicon–germanium (SiGe) and silicon (Si) strained-layer epitaxy to practice bandgap engineering of semiconductor devices in the highly manufacturable Si material system is an old one, only in the past decade has this concept become a practical reality. The final success of creating novel Si...
Micromechanical Photonics (Microtechnology and MEMS)
Micromechanical Photonics (Microtechnology and MEMS)
The recent remarkable development of microsystems dates back to 1983 when Richard P. Feynman of California University delivered a speech to a large audience of scientists and engineers at the Jet Propulsion Laboratory. He presented the concept of sacrificed etchingto fabricate a silicon micromotor, and pointed out the need for...
Distortion in RF Power Amplifiers (Artech House Microwave Library)
Distortion in RF Power Amplifiers (Artech House Microwave Library)

A treatment of distortion in RF power amplifiers. It seeks to offer guidance on designing easily linearizable systems that have low memory effects. The reader is offered a detailed understanding of how the matching impedances of a power amplifier and other RF circuits can be tuned to minimize overall distortion. It also demonstrates how to...

CMOS IC Layout: Concepts, Methodologies, and Tools
CMOS IC Layout: Concepts, Methodologies, and Tools
Once upon a time, around about 1988, after finishing a very stressful but successful project within Motorola Semiconductor Israel (MSIL), the entire team was invited to a special lunch. Everybody was happy that we finished the “project” ahead of time, and we were there to enjoy the victory of “tape-out.”...
Fowler-Nordheim Field Emission: Effects in Semiconductor Nanostructures (Springer Series in Solid-State Sciences, Vol. 170)
Fowler-Nordheim Field Emission: Effects in Semiconductor Nanostructures (Springer Series in Solid-State Sciences, Vol. 170)

This monograph solely presents the Fowler-Nordheim field emission (FNFE) from semiconductors and their nanostructures. The materials considered are quantum confined non-linear optical, III-V, II-VI, Ge, Te, carbon nanotubes, PtSb2, stressed materials, Bismuth, GaP, Gallium Antimonide, II-V, Bi2Te3, III-V, II-VI, IV-VI and HgTe/CdTe...

Electronics: A Systems Approach (3rd Edition)
Electronics: A Systems Approach (3rd Edition)

Electronics represents one of the most important, and rapidly changing, areas of engineering. It is used at the heart of a vast range of products that extends from mobile phones to computers, and from cars to nuclear power stations. For this reason, all engineers, scientists and technologists need a basic understanding of such systems, while...

Fundamentals of Ultra-Thin-Body MOSFETs and FinFETs
Fundamentals of Ultra-Thin-Body MOSFETs and FinFETs

Understand the theory, design and applications of the two principal candidates for the next mainstream semiconductor-industry device with this concise and clear guide to FD/UTB transistors. • Describes FD/SOI MOSFETs and 3-D FinFETs in detail • Covers short-channel effects, quantum-mechanical effects, applications of UTB devices to...

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